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Semiconductor

Chiller (Ultra-Low Temperature / Single & Dual)

Ultra-low temperature chiller that removes heat generated by high-heat chips required in semiconductor probe station (EDS) processes

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Chiller (Ultra-Low Temperature / Single & Dual)
Specifications

Product Specifications

Cooling Capacity
6,000W @ -60℃ (Cold Process)
Temperature Stability
-65℃ ±0.2℃
Refrigeration Method
Auto Cascade (Compact Size)
Control Method
Energy saving through Hot Gas control
Configuration
One Dual Type unit simultaneously controls 2 Prober stages
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