Semiconductor Equipment

Semiconductor

We supply thermal processing and precision environmental control equipment for the entire wafer manufacturing process.

Equipment that passivates silicon dangling bonds through high-pressure D2 anneal

Diffusion Furnace

Diffusion furnace for wafer oxidation and deposition processes

Vacuum annealing equipment for Mold Wafer / FAN-OUT processes

Furnace dedicated to low-temperature TSV processes

Pressurized cure process equipment for wafers

P-Furnace / PRIMUS-IR

High-precision thermal processing furnace lineup

Humidity Conditioner Module

Precision temperature-control chiller systems

Smart wafer storage system

High- and low-temperature test chamber