Semiconductor

NEOCON

Equipment that achieves a low-humidity environment similar to an N2 EFEM through partial modification of an existing EFEM, without nitrogen (N2) supply

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Specifications

Product Specifications

Humidity Control Level

Maintains internal EFEM humidity at RH 9% or below

Application Method

Existing EFEM air-conditioning system + additional dehumidification module

Advantages

Relatively low cost; applicable to both new equipment and retrofits of existing equipment

Compared to N2 EFEM

Achieves a similar low-humidity environment without the high cost and environmental safety issues

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