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Oxide Furnace

Large-area heat treatment equipment for oxide TFT manufacturing

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Oxide Furnace
Specifications

Product Specifications

Set Temperature
300~400℃ (Max 500℃)
Temp Control
Phase/MIMO/Zero Crossing control (within ±2.5℃)
Cleanliness
Particle Free
Applicable Process
Oxide TFT heat treatment
Glass Compatibility
Up to Gen 8 (8G)
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