Semiconductor

Auto Clave

Semiconductor process equipment that pressurizes and cures filler-filled materials during Multi Stack, Flip Chip, and similar processes to remove voids and complete curing

Auto Clave
Specifications

Product Specifications

Pressure
~10 bar
Pressure Control
Pressurization/depressurization (multi-stage valve control)
Temperature
100℃ ~ 180℃
Temp Uniformity
±2℃
Heating Method
Convection
Conveyor Type
Non-contact magnetic conveyor type
Factory Automation Compatibility
AGV, OHT, Customer Carrier